The PSDP-UVT Pro series with PID controlled heated sample stage is designed for applications in the electronic, semiconductor, optics and scientific industries. A mercury vapor lamp generates ultra-violet light and ozone resulting in the atomic cleaning of silicon, silicon nitride, glass, metals, ceramics and other materials. The PSDP-UVT Series can also be used for UV curing, UV patterning, sharpening AFM probes and ozone etching and more.
The addition of a heated stage on the PSDP-UVT Series enhances the cleaning process of many applications. Unit specifications appear below.
PSDP-UVT Pro system sizes range from a 3" UV system that is ideal for AFM tips and microscope slides to a large 12x16" UV system capable of handling multiple wafers or LCD panels.
For information regarding UV cleaner models, sample sizes and system prices, please fill out the "Contact Me" section at the bottom of this page.
Features
- Digitally Controlled Heated Stage up to 150 degrees C
- The PSDP-UVT removes organic contaminates
- UV lamp generates UV light at both 185nm and 254nm
- Produces O3 and provides molecular excitation
- Operates at atmospheric pressure with ambient air or oxygen
- Multiple gas ports for the introduction of gases
- Adjustable sample to lamp distance
- Safety switched to prevent user exposure to UV light
- Simple operation and compact footprint
- First rate technical support and customer service
Suitable Substrate Materials
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Common UV/Ozone Applications
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