

PSD-UVT - Benchtop UV Cleaner With Heater
The PSD-UVT was designed for applications in the electronic, semiconductor and scientific industries. A mercury vapor lamp generates ultra-violet light and ozone resulting in the atomic cleaning of silicon, silicon nitride, glass and other materials. The PSD-UVT can also be used for UV curing, UV patterning, sharpening AFM probes and ozone etching. The addition of a heated stage on the PSD-UVT enhances the cleaning process of many applications. Unit specifications appear below.
Features
- Digitally Controlled Heated Stage up to 150 degrees C
- The PSD-UVT removes organic contaminates
- UV lamp generates UV light at both 185nm and 254nm
- Produces O3 and provides molecular excitation
- Operates at atmospheric pressure with ambient air or oxygen
- Multiple gas ports for the introduction of gases
- Adjustable sample to lamp distance
- Safety switched to prevent user exposure to UV light
- Simple operation and compact footprint
- First rate technical support and customer service


Suitable Substrate Materials
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Common UV/Ozone Applications
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