Novascan: Innovative Tools for Nanoscience Research
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PSD-UVOP - Flow-through Ozone Generator

The PSD-UVOP Ozone Generator produces high levels of ozone with the introduction of pure O2 into the pump chamber. The PSD-UVOP has been designed for use with the PSD series of UV-Ozone cleaning systems available from Novascan Technologies, or with other instruments benefiting from high levels of ozone for general function or cleaning applications.



Features
  • Produces >100ppm O3 when operated with O2
  • Operates at atmospheric pressure
  • Simple operation and compactfootprint
  • First rate technical support and customer service
PSD-UVT Benchtop UV-Ozone Cleaner for Ultraviolet ozone treatment of AFM Probes and Semiconductor Applications

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Suitable Substrate Materials
  • Silicon
  • Gallium Aresenide
  • Glass
  • Quartz
  • Mica
  • Sapphire
  • Metals
  • Ceramics
  • Polymers
  • Resists
Common UV/Ozone Applications
  • AFM Probe Cleaning / Tip Sharpening
  • Semiconductor Surface Oxidation and Preparation
  • Cleaning Lenses and Optics
  • Improvement of Surface Wettability
  • Cleaning Quartz and Ceramic Surfaces
  • Preparation for Thin Film Deposition
  • Ultraviolet Curing
  • Surface Patterning
  • Ozone Etching
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