History
| 1981 | STM developed by Binnig, Rohrer, Gerber, and Weibel at IBM-Zurich |
| 1982 | Atomic resolution demonstrated by Binnig on Si(7x7) |
| 1984 | Near-field Optical Microscope developed |
| 1985 | AFM developed by Binnig, Gerber, and Quate at IBM-Zurich/Standford University |
| 1986 | Nobel Prize in physics awarded to Bennig & Rohrer for development of the STM |
| 1987 | Noncontact AFM introduced |
| MFM developed | |
| 1988 | Commercial AFM available |
| 1990 | Individual atoms are manipulated |
| 1991 | Microfabricated AFM probes are introduced |
| 1992 | Piezolevers are introduced |
| Shear-force detection type NSOM/SNOM are introduced | |
| 2003 | President Bush signs Nanotechnology Research & Development Act |
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